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1

Plasma formation resulting from the interaction of a laser beam with a solid metal target in an ambient gas

Boulmer-Leborgne, C, Hermann, J, Dubreuil, B

Journal:

Plasma Sources Science and Technology

Year:

1993

Language:

english

File:

PDF, 616 KB

english, 1993

2

Laser-assisted processes in the microelectronic industry

J.P. Budin, J. Boulmer, D. De´barre

Journal:

Thin Solid Films

Year:

1989

Language:

english

File:

PDF, 1.61 MB

english, 1989

3

Direct carbidation of titanium as a result of multipulse UV-laser irradiation of titanium samples in an ambient methane gas

C. Boulmer-Leborgne, J. Hermann, B. Dubreuil, P. Brault, M.L. DeGiorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, I.N. Mihailescu, I. Ursu, G. Blondiaux, J.L. Debrun, H. Estrade, B. Rousseau

Journal:

Applied Surface Science

Year:

1992

Language:

english

File:

PDF, 292 KB

english, 1992

4

Synthesis of strained SiGe on Si(100) by pulsed laser induced epitaxy

T. Kociniewski, F. Fossard, J. Boulmer, D. Bouchier

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 460 KB

english, 2010

5

Thermal behaviour of electric connector coating irradiated by a laser beam

Nadjib Semmar, Cécile Georges, Chantal Boulmer-Leborgne

Journal:

Microelectronics Journal

Year:

2002

Language:

english

File:

PDF, 341 KB

english, 2002

6

A spectroscopic study of laser ablation plasmas from Ti, Al and C targets

J Hermann, C Vivien, A.P Carricato, C Boulmer-Leborgne

Journal:

Applied Surface Science

Year:

1998

Language:

english

File:

PDF, 144 KB

english, 1998

7

Laser surface modification: structural and tribological studies of AlN coatings

C. Meneau, P. Andreazza, C. Andreazza-Vignolle, P. Goudeau, J.-P. Villain, C. Boulmer-Leborgne

Journal:

Surface and Coatings Technology

Year:

1998

Language:

english

File:

PDF, 590 KB

english, 1998

8

TiN layer synthesis by laser-plasma

A.L. Thomann, J. Hermann, C. Boulmer-Leborgne

Journal:

Thin Solid Films

Year:

1994

Language:

english

File:

PDF, 459 KB

english, 1994

9

Effect of pulsed laser parameters on the corrosion limitation for electric connector coatings

C. Georges, N. Semmar, C. Boulmer-Leborgne

Journal:

Optics and Lasers in Engineering

Year:

2006

Language:

english

File:

PDF, 560 KB

english, 2006

10

Laser-induced explosive boiling during nanosecond laser ablation of silicon

V. Craciun, N. Bassim, R.K. Singh, D. Craciun, J. Hermann, C. Boulmer-Leborgne

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 172 KB

english, 2002

11

Diagnostics of the early phase of an ultraviolet laser induced plasma by spectral line analysis considering self-absorption

Hermann, J., Boulmer-Leborgne, C., Hong, D.

Journal:

Journal of Applied Physics

Year:

1998

Language:

english

File:

PDF, 376 KB

english, 1998

12

Optical properties of rare earth-doped TiO2 anatase and rutile thin films grown by pulsed-laser deposition

Le Boulbar, E., Millon, E., Boulmer-Leborgne, C., Cachoncinlle, C., Hakim, B., Ntsoenzok, E.

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 498 KB

english, 2014

13

[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - Excimer-laser activation of dopants in silicon : a high-energy excimer laser source for a single shot and uniform treatment over a whole die area

Prat, C., Zahorski, D., Stehle, M., Boulmer, J., Debarre, D., Kerrien, G.

Year:

2001

Language:

english

File:

PDF, 138 KB

english, 2001

14

[IEEE 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Portland, OR, USA (28-30 Sept. 2004)] 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004. - Integration of a long pulse laser thermal process for ultra shallow junction formation of CMOS devices

Venturini, J., Hernandez, M., Huet, K., Laviron, C., Akhouayri, H., Sarnet, T., Boulmer, J.

Year:

2004

Language:

english

File:

PDF, 729 KB

english, 2004

15

[IEEE 2009 6th IEEE International Conference on Group IV Photonics (GFP) - San Francisco, CA, USA (2009.09.9-2009.09.11)] 2009 6th IEEE International Conference on Group IV Photonics - Tensile-strain and n-type doping of germanium-on-insulator : Towards a Ge laser

Kurdi, M. El, Ngo, T.-P., Checoury, X., Sauvage, S., Fishman, G., Kociniewski, T., Debarre, D., Boulmer, J., Boucaud, P., Damlencourt, J. F., Kermarrec, O., Bensahel, D., Jakomin, R., Sagnes, I.

Year:

2009

Language:

english

File:

PDF, 421 KB

english, 2009

16

Realization of Si1−x−yGexCySi heterostructures by pulsed laser induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC: H films deposited on Si(100)

J. Boulmer, P. Boucaud, C. Guedj, D. Débarre, D. Bouchier, E. Finkman, S. Prawer, K. Nugent, A. Desmur-Larré, C. Godet, P. Roca i Cabarrocas

Journal:

Journal of Crystal Growth

Year:

1995

Language:

english

File:

PDF, 400 KB

english, 1995

17

Time of flight study of low pressure laser etching of silicon by chlorine

J. Boulmer, B. Bourguignon, J.P. Budin, D. Debarre

Journal:

Applied Surface Science

Year:

1989

Language:

english

File:

PDF, 566 KB

english, 1989

18

Spectroscopic study of the plasma created by interaction between a TEA CO2 laser beam and a Ti target in a cell containing helium gas

J. Hermann, C. Boulmer-Leborgne, B. Dubreuil

Journal:

Applied Surface Science

Year:

1990

Language:

english

File:

PDF, 375 KB

english, 1990

19

Laser etching of silicon by chlorine: effect of post-desorption collisions and chlorine in-diffusion on the laser desorption yield

A. Aliouchouche, J. Boulmer, B. Bourguignon, J.-P. Budin, D. Débarre, A. Desmur

Journal:

Applied Surface Science

Year:

1993

Language:

english

File:

PDF, 635 KB

english, 1993

20

The role of gas-phase in the laser etching of Cu by CCl4

D. Débarre, A. Aliouchouche, J. Boulmer, B. Bourguignon, J.P. Budin

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 327 KB

english, 1996

21

Bulk and surface structural properties of Si1−x−yGexCy layers processed on Si(001) by pulsed laser induced epitaxy

C. Guedj, J. Boulmer, D. Bouchier, C. Clerc, G. Calvarin, C. Godet, P. Roca i Cabarrocas, F. Houze, D. Mencaraglia

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 431 KB

english, 1996

22

Direct measurement of diffusion cooling in an afterglow plasma

J. Boulmer, C. Sol, J.C. Gauthier

Journal:

Physics Letters A

Year:

1972

Language:

english

File:

PDF, 150 KB

english, 1972

23

Modelisation of a time dependent resonant laser perturbation in a helium glow discharge

C. Boulmer-Leborgne, G. Gousset

Journal:

Physics Letters A

Year:

1986

Language:

english

File:

PDF, 128 KB

english, 1986

24

Laser thermal processing using an optical coating for ultra shallow junction formation

M. Hernandez, J. Venturini, D. Berard, G. Kerrien, T. Sarnet, D. Débarre, J. Boulmer, C. Laviron, D. Camel, J.-L. Santailler, H. Akhouayri

Journal:

Materials Science and Engineering: B

Year:

2004

Language:

english

File:

PDF, 276 KB

english, 2004

25

Chemical and structural modifications of laser treated iron surfaces: investigation of laser processing parameters

A.L Thomann, A Basillais, M Wegscheider, C Boulmer-Leborgne, A Pereira, P Delaporte, M Sentis, T Sauvage

Journal:

Applied Surface Science

Year:

2004

Language:

english

File:

PDF, 668 KB

english, 2004

26

Laser doping for microelectronics and microtechnology

Thierry Sarnet, Gurwan Kerrien, Nourdin Yaakoubi, Alain Bosseboeuf, Elisabeth Dufour-Gergam, Dominique Débarre, Jacques Boulmer, Kuniyuki Kakushima, Cyrille Laviron, Miguel Hernandez, Julien Venturini

Journal:

Applied Surface Science

Year:

2005

Language:

english

File:

PDF, 646 KB

english, 2005

27

Pure and Nb-doped TiO1.5 films grown by pulsed-laser deposition for transparent p–n homojunctions

E. Le Boulbar, E. Millon, J. Mathias, C. Boulmer-Leborgne, M. Nistor, F. Gherendi, N. Sbaï, J.B. Quoirin

Journal:

Applied Surface Science

Year:

2011

Language:

english

File:

PDF, 412 KB

english, 2011

28

Epitaxial growth of copper oxide films by reactive cross-beam pulsed-laser deposition

W. Seiler, E. Millon, J. Perrière, R. Benzerga, C. Boulmer-Leborgne

Journal:

Journal of Crystal Growth

Year:

2009

Language:

english

File:

PDF, 520 KB

english, 2009

29

Silicon periodic nano-structures obtained by laser exposure of nano-wires

K. Kakushima, T. Bourouina, T. Sarnet, G. Kerrien, D. Débarre, J. Boulmer, H. Fujita

Journal:

Microelectronics Journal

Year:

2005

Language:

english

File:

PDF, 233 KB

english, 2005

30

Yttria-stabilized zirconia thin films deposited by pulsed-laser deposition and magnetron sputtering

H. Hidalgo, E. Reguzina, E. Millon, A.-L. Thomann, J. Mathias, C. Boulmer-Leborgne, T. Sauvage, P. Brault

Journal:

Surface and Coatings Technology

Year:

2011

Language:

english

File:

PDF, 691 KB

english, 2011

31

Epitaxial ZnO thin films grown by pulsed electron beam deposition

S. Tricot, M. Nistor, E. Millon, C. Boulmer-Leborgne, N.B. Mandache, J. Perrière, W. Seiler

Journal:

Surface Science

Year:

2010

Language:

english

File:

PDF, 680 KB

english, 2010

32

Local strains in Si1−x−yGexCy alloys as deduced from vibrational frequencies

E. Finkman, H. Rücker, F. Meyer, S.D. Prawer, D. Bouchier, J. Boulmer, S. Bodnar, J.L. Regolini

Journal:

Thin Solid Films

Year:

1997

File:

PDF, 373 KB

1997

33

Incorporation of substitutional carbon in Si and SiGe by laser processing in methane and propylene

J. Boulmer, C. Guedj, D. Débarre

Journal:

Thin Solid Films

Year:

1997

File:

PDF, 323 KB

1997

34

Laser treatment for corrosion prevention of electrical contact gold coating

C. Georges, H. Sanchez, N. Semmar, C. Boulmer-Leborgne, C. Perrin, D. Simon

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 311 KB

english, 2002

35

Excimer laser induced plasma for aluminum alloys surface carburizing

F. Fariaut, C. Boulmer-Leborgne, E. Le Menn, T. Sauvage, C. Andreazza-Vignolle, P. Andreazza, C. Langlade

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 292 KB

english, 2002

36

Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping

G Kerrien, J Boulmer, D Débarre, D Bouchier, A Grouillet, D Lenoble

Journal:

Applied Surface Science

Year:

2002

Language:

english

File:

PDF, 132 KB

english, 2002

37

Raman spectroscopy of Si1 − x − yGexCy layers obtained by pulsed laser induced epitaxy

E. Finkman, J. Boulmer, P. Boucaud, C. Guedj, D. Bouchier, K. Nugent, S. Prawer

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 524 KB

english, 1996

38

GaN thin films deposition by laser ablation of liquid Ga target in nitrogen reactive atmosphere

M. Dinescu, P. Verardi, C. Boulmer-Leborgne, C. Gerardi, L. Mirenghi, V. Sandu

Journal:

Applied Surface Science

Year:

1998

Language:

english

File:

PDF, 92 KB

english, 1998

39

Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

C Vivien, M Dinescu, P Meheust, C Boulmer-Leborgne, A.P Caricato, J Perrière

Journal:

Applied Surface Science

Year:

1998

Language:

english

File:

PDF, 108 KB

english, 1998

40

Excimer laser induced surface nitriding of aluminium alloy

E Sicard, C Boulmer-Leborgne, T Sauvage

Journal:

Applied Surface Science

Year:

1998

Language:

english

File:

PDF, 231 KB

english, 1998

41

Surface carburization of aluminum alloys by excimer laser

F Fariaut, C Boulmer-Leborgne, E Le Menn, T Sauvage, C Andreazza, P Andreazza, C Langlade

Journal:

Surface and Coatings Technology

Year:

2001

Language:

english

File:

PDF, 997 KB

english, 2001

42

Surface nitriding of titanium and aluminium by laser-induced plasma

A.L Thomann, E Sicard, C Boulmer-Leborgne, C Vivien, J Hermann, C Andreazza-Vignolle, P Andreazza, C Meneau

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 245 KB

english, 1997

43

Excimer laser treatment for aluminium alloy mechanical property enhancement

E. Sicard, C. Boulmer-Leborgne, C. Andreazza-Vignolle, P. Andreazza, C. Langlade, B. Vannes

Journal:

Surface and Coatings Technology

Year:

1998

Language:

english

File:

PDF, 472 KB

english, 1998

44

Chemical structure of films grown by AlN laser ablation: an X-ray photoelectron spectroscopy study

N. Laidani, L. Vanzetti, M. Anderle, A. Basillais, C. Boulmer-Leborgne, J. Perriere

Journal:

Surface and Coatings Technology

Year:

1999

Language:

english

File:

PDF, 138 KB

english, 1999

45

Innovative electrochemical deep etching technique involving aluminum thermomigration

S. Kouassi, G. Gautier, L. Ventura, J. Semai, C. Boulmer-Leborgne, B. Morillon, M. Roy

Journal:

physica status solidi (c)

Year:

2007

Language:

english

File:

PDF, 359 KB

english, 2007

46

Pseudomorphic and relaxed SiGe/Si(001) layer synthesis by gas immersion laser doping (GILD)

Thierry Kociniewski, Frédéric Fossard, Jean-Luc Perrossier, Dominique Débarre, Jacques Boulmer

Journal:

physica status solidi (c)

Year:

2011

Language:

english

File:

PDF, 195 KB

english, 2011

47

Laser etching of silicon: Dopant desorption, diffusion and segregation during laser induced surface melting

A. Desmur, J.-B. Ozenne, B. Bourguignon, J. Boulmer, J.-P. Budin, D. Débarre, A. Aliouchouche

Journal:

Surface and Interface Analysis

Year:

1994

Language:

english

File:

PDF, 383 KB

english, 1994

48

Spectroscopic observation of the plasma produced by a CO2laser beam interacting with titanium target under helium and/or argon atmosphere

C. Boulmer-Leborgne, J. Hermann, B. Dubreuil

Journal:

Applied Physics A: Materials Science & Processing

Year:

1992

Language:

english

File:

PDF, 1.01 MB

english, 1992

49

Time-resolved spectroscopy measurements of a titanium plasma induced by nanosecond and femtosecond lasers

O. Albert, S. Roger, Y. Glinec, J.C. Loulergue, J. Etchepare, C. Boulmer-Leborgne, J. Perrière, E. Millon

Journal:

Applied Physics A: Materials Science & Processing

Year:

2003

Language:

english

File:

PDF, 188 KB

english, 2003

50

Improvement of the PLD process assisted by RF plasma for AlN growth

A. Basillais, R. Benzerga, H. Sanchez, E. Le Menn, C. Boulmer-Leborgne, J. Perrière

Journal:

Applied Physics A: Materials Science & Processing

Year:

2005

Language:

english

File:

PDF, 1.05 MB

english, 2005